On the in-situ determination of the effective secondary electron emission coefficient in low pressure capacitively coupled radio frequency discharges based on the electrical asymmetry effect
Publication Details
Publication Year
2025
Authors
Masheyeva, R.
Hartmann, P.
Luo, L.-Y.
Dzhumagulova, K.
Liu, Y.-X.
Schulze, J.
Donkó, Z.
Source/Journal
Journal of Physics D: Applied Physics
Publication Type
ArticleISSN
ISSN-00223727
SJR Percentile
23%
EID
2-s2.0-85219452805
Abstract
https://www.scopus.com/record/display.url?eid=2-s2.0-85219452805&origin=resultslist
Subject Areas
Electronic, Optical and Magnetic Materials
Surfaces, Coatings and Films
Acoustics and Ultrasonics
Condensed Matter Physics
ASJC Codes
2504| 2508| 3102| 3104